2016
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ECS Transactions

VISZ Non-Visual Defect Monitoring with Surface Photovoltage Mapping

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Abstract

Topic

Non-Contact Measurement, silicon carbide (SiC), surface voltage, wafer mapping, non-visual defects

Author

Andrew David Findlay, Dmitriy Marinskiy, Piotr Edelman, Marshall Wilson, Alexandre Savtchouk, Carlos Almeida, Jacek Lagowski
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