DLS-1100 Deep Level Transient Spectroscopy

• Electrically active defect and contamination identificationOption: TAS (Thermal Admittance Spectroscopy)

• Full range of DLTS measurement modes, including:
  
  • Temperature and frequency scans
  • Depth profiling
  • Capture cross section determination
  • MOS interface state density measurements
  • I-V and C-V sample quality tests
  • Current DLTS (I-DLS) option for highly conducitive samples during temperature sweeps

• Industry-leading sensitivity with improved signal-to-noise ratio

• Precise thermal control with multi-sensor temperature monitoring

• Trusted tool widely used in semiconductor production facilities across Europe and Asia

• Measurement Sensitivity:
  Detects trace contaminants down to 5 × 10⁷ atoms/cm³, among the highest sensitivity levels in the industry

• Operation:
  • Destructive technique, requiring Schottky and ohmic contact sample preparation
  • Full automation with batch sample support (config-dependent)
  • Macro-based measurement scripting
  • Integrated cryogenic temperature control with multiple sensor inputs (accuracy better than 1 K
  ‍
• User Interface
  ‍
  Graphical UI designed for ease of use by trained operators
  ‍
• Cryostat:
  • Up to 6 probes,
  • LN2 or close cycle He,
  • Widest temp.range: 30K-800K
  • Automated temp. control on selected cryostats
  ‍

• Bias and pulse voltage range:  20 V or ±50 V
• HF Signal:  1MHz @ 20mV, 100mV, 500mV
•  Sample capacitance:  <5000pF
• Trap sensitivity: <1E8 / cm3
• Cryostat selection:
  
  • Bath type LN2  80-450K
  • Automatic LN2  80-800K
  • Tabletop closed cycle He  30-450K
  • Low vibration closed cycle He  30-450K (800K)
• Cryostat:
  
  • Up to 6 probes,
  • LN2 or close cycle He,
  • Widest temp.range: 30K-800K
  • Automated temp. control onselected cryostats

‍