Lehighton-2000RS Sheet Resistance and Mobility Measurement

• Non-contact and high throughput sheet resistance measurement of semiconductor device materials
• Supported materials: SiC, GaN, AlGaN, GaAs, InP, InAs, InGaAs, Graphene

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• The Lehighton uses non-contact Eddy probe head in order to determinesheet resistance with high precision.
• Double side non-contact measurement
• AC driven coils
• Double coil design for reducing distance-dependence
• Triple Eddy probe head forwide range of sheet resistance
• Semi-automated platform witha small footprint

• Ideal for resistancemeasurements on various material
• With a special focus or compoundsemiconductors: GaN/AlGaN, GaAs, InP, InAs, InGaAs, Graphene, SiC;
• Sample size: 3-8”