New COCOS (Corona Oxide Characterization of Semiconductor) Method for Monitoring the Reliability of Thin Gate Oxides

COCOS, Interface structure, surface treatment, Corona effect, Voltage current curve, reliability, Oxide layer, Defect detection, Comparative study, Experimental result, Waveform

M. Wilson, J. Lagowski, A. Savtchouk, L. Jastrebski, J. D'Amico, D.K. DeBusk, A. Buczkowski