2007
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SEMI Seminars, July 17 to 19, 2007, San Francisco, USA, West Coast Junction Technology Group, USJ metrology seminar

High Resolution Mapping of Sheet Resistance Reveal Implanter or Anneal Non-Uniformities

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Abstract

Topic

sheet resistance, ultra shallow implants, junction photovoltage technique

Author

C. Kohn, E. Don, P. Tüttő, A. Pap, T. Pavelka
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